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costs.\n\n",{"id":317,"documentId":318,"name":319,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":320,"ext":58,"mime":59,"size":321,"url":322,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":323,"updatedAt":324,"publishedAt":323},{"id":418,"title":419,"description":420,"icon":421},653,"Globally Compliant and Connected","SEMI S2 compliant and CE marked, with Ethernet connectivity and Central Monitoring System support for seamless facility 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The M91A uses patented microwave plasma technology, which is specifically optimised for high bond-energy fluorinated gases such as PFCs and NF₃. The M91A requires no fuel supply and operates at significantly lower power consumption.\u003C\u002Fspan>\u003C\u002Fp>",{"id":441,"question":442,"answer":443},840,"What gases does the M91A treat?","\u003Cp>The M91A is designed to treat PFC-loaded gases and fluorinated greenhouse gases generated during semiconductor and flat panel display manufacturing processes, including gases from etching, CVD, and chamber cleaning steps.\u003C\u002Fp>",{"id":445,"question":446,"answer":447},841,"How does microwave plasma abatement work?","\u003Cp>icrowave plasma abatement harnesses microwave radiation to ionise effluent gases, transforming them into a plasma state. This breaks molecular bonds and achieves decomposition of highly stable compounds at the molecular level, without the need for combustion fuel.\u003C\u002Fp>",{"id":449,"question":450,"answer":451},842,"Is the M91A suitable for point-of-use installation?","\u003Cp>Yes. The M91A is developed and tested specifically as a point-of-use abatement system, designed for direct connection to semiconductor and flat panel display process equipment at the tool level.\u003C\u002Fp>",{"id":453,"question":454,"answer":455},843,"What connectivity does the M91A support?","\u003Cp>The M91A is Ethernet ready and supports integration with a Central Monitoring System, allowing real-time system monitoring and interlock management through your facility network.\u003C\u002Fp>",{"id":457,"title":458,"description":459,"button":460},298,"Need help choosing a system?","Our specialist are here to guide you.",{"id":461,"label":123,"link":124,"button_type":125},488,{"id":463,"documentId":464,"name":465,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":466,"ext":467,"mime":468,"size":469,"url":470,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":471,"updatedAt":471,"publishedAt":471,"related":472},461,"exzfp63n8qrazpbpr286rc8t","Data Sheet-M91A-Rev.B1-EN.pdf","Data_Sheet_M91_A_Rev_B1_EN_2b8f748f55",".pdf","application\u002Fpdf",167.37,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_M91_A_Rev_B1_EN_2b8f748f55.pdf","2026-03-21T09:48:39.580Z",[473],{"__type":474,"id":364,"documentId":365,"title":366,"url":367,"metaTitle":368,"metaDescription":369,"subtitle":370,"description":371,"createdAt":372,"updatedAt":373,"publishedAt":374},"api::product.product",[476,507],{"id":477,"documentId":478,"name":479,"alternativeText":55,"caption":55,"width":480,"height":481,"formats":482,"hash":500,"ext":486,"mime":487,"size":501,"url":502,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":503,"updatedAt":503,"publishedAt":504,"related":505},188,"mssq7j854x553439iksqt2q6","M91A.png",460,597,{"thumbnail":483,"small":493},{"name":484,"hash":485,"ext":486,"mime":487,"path":55,"width":488,"height":489,"size":490,"sizeInBytes":491,"url":492},"thumbnail_M91A.png","thumbnail_M91_A_b7ab395b0b",".png","image\u002Fpng",120,156,23.86,23855,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_M91_A_b7ab395b0b.png",{"name":494,"hash":495,"ext":486,"mime":487,"path":55,"width":496,"height":98,"size":497,"sizeInBytes":498,"url":499},"small_M91A.png","small_M91_A_b7ab395b0b",385,181.15,181146,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_M91_A_b7ab395b0b.png","M91_A_b7ab395b0b",74.65,"https:\u002F\u002Fecosys.assetz.my\u002FM91_A_b7ab395b0b.png","2025-11-07T04:19:00.121Z","2025-11-07T04:19:00.122Z",[506],{"__type":474,"id":364,"documentId":365,"title":366,"url":367,"metaTitle":368,"metaDescription":369,"subtitle":370,"description":371,"createdAt":372,"updatedAt":373,"publishedAt":374},{"id":508,"documentId":509,"name":510,"alternativeText":55,"caption":55,"width":511,"height":512,"formats":513,"hash":528,"ext":486,"mime":487,"size":529,"url":530,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":531,"updatedAt":531,"publishedAt":531,"related":532},458,"txmnz89wjht5feir96wz77fg","m91a 1.png",535,542,{"thumbnail":514,"small":521},{"name":515,"hash":516,"ext":486,"mime":487,"path":55,"width":517,"height":489,"size":518,"sizeInBytes":519,"url":520},"thumbnail_m91a 1.png","thumbnail_m91a_1_f513922331",154,3.61,3607,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_m91a_1_f513922331.png",{"name":522,"hash":523,"ext":486,"mime":487,"path":55,"width":524,"height":98,"size":525,"sizeInBytes":526,"url":527},"small_m91a 1.png","small_m91a_1_f513922331",494,19.35,19351,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_m91a_1_f513922331.png","m91a_1_f513922331",21.48,"https:\u002F\u002Fecosys.assetz.my\u002Fm91a_1_f513922331.png","2026-03-21T09:44:52.092Z",[533],{"__type":474,"id":364,"documentId":365,"title":366,"url":367,"metaTitle":368,"metaDescription":369,"subtitle":370,"description":371,"createdAt":372,"updatedAt":373,"publishedAt":374},{"id":535,"documentId":536,"title":537,"url":538,"metaTitle":539,"metaDescription":540,"subtitle":541,"description":542,"createdAt":543,"updatedAt":544,"publishedAt":545,"accordion":546,"resources":55,"specifications":55,"product_category":553,"swipe_card":566,"faq":598,"cta_banner":621,"file_upload":625,"product_image":635},107,"eghlvy8pxvitysr1ze22u31k","Marathon M91","marathon-m91","Marathon M91 | Gas Abatement System | EcoSys","Discover the Marathon M91 abatement system engineered for efficient gas treatment in semiconductor manufacturing. ","Integrated Combustion and Wet Abatement","The Marathon M91 is an integrated combustion and wet abatement system designed to remove process gases through the flame area of the main combustion chamber by means of combustion or pyrolysis. Flowing water forms a waterwall on the inner chamber wall, preventing byproduct deposition while cooling the combustion chamber. Multiple nozzles at the lower end of the chamber absorb water-soluble harmful substances before discharge. The M91 is designed for controlled decomposition and oxidation treatment of fluorinated greenhouse gases.","2025-11-05T03:25:21.896Z","2026-03-30T10:14:12.194Z","2026-03-30T10:14:12.505Z",[547,550],{"id":548,"title":378,"description":549},563,"\u003Cul>\u003Cli>Low power consumption\u003C\u002Fli>\u003Cli>Limited NOx and CO emission\u003C\u002Fli>\u003Cli>High flow capacity\u003C\u002Fli>\u003Cli>Reduced water consumption and recirculating water system  \u003C\u002Fli>\u003Cli>Low cost of ownership\u003C\u002Fli>\u003Cli>Ease of installation and services\u003C\u002Fli>\u003Cli>SEMI S2 compliance, CE marked\u003C\u002Fli>\u003Cli>Ethernet ready\u003C\u002Fli>\u003C\u002Ful>",{"id":551,"title":382,"description":552},564,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Polysilicon\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">CVD\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Pyrophoric\u002Fflammable gas combustion\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Gas cabinet vent purge\u003C\u002Fli>\u003C\u002Ful>",{"id":5,"documentId":6,"name":7,"createdAt":8,"updatedAt":9,"publishedAt":10,"url":11,"metaTitle":7,"metaDescription":12,"background_image":554,"content_block":560},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":555,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":556,"large":557,"small":558,"medium":559},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[561,562,563,564,565],{"__component":234,"id":393,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},{"__component":280,"id":395,"subtitle":282,"title":283},{"__component":326,"id":397,"subtitle":328,"title":329,"Style":330},{"__component":352,"id":399,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":401,"title":358,"description":359},{"id":567,"subtitle":404,"title":568,"cards":569},249,"Why Choose M91",[570,582,594],{"id":571,"title":572,"description":573,"icon":574},855,"Efficient and Clean Operation","The M91 uses combustion and pyrolysis to decompose process gases, with a recirculating water system that reduces water consumption and limits NOx and COx emissions during operation.\n\n",{"id":432,"documentId":575,"name":576,"alternativeText":55,"caption":55,"width":293,"height":577,"formats":55,"hash":578,"ext":58,"mime":59,"size":309,"url":579,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":580,"updatedAt":581,"publishedAt":580},"fkkuv1w40uqlfdk55ze60kv5","earth-leaf.svg",62,"earth_leaf_a04a0d2a65","https:\u002F\u002Fecosys.assetz.my\u002Fearth_leaf_a04a0d2a65.svg","2025-11-07T06:08:18.867Z","2026-03-30T08:34:54.548Z",{"id":583,"title":584,"description":585,"icon":586},856,"High Capacity, Low Maintenance","With a process gas capacity of 600 slm and a waterwall design that prevents byproduct deposition, the M91 delivers consistent performance with reduced cleaning and maintenance requirements.",{"id":587,"documentId":588,"name":589,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":590,"ext":58,"mime":59,"size":591,"url":592,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":593,"updatedAt":593,"publishedAt":593},191,"qwevliuin1ng0r89u24ug9a0","spanar.svg","spanar_cd034bac8e",2.14,"https:\u002F\u002Fecosys.assetz.my\u002Fspanar_cd034bac8e.svg","2025-11-07T06:08:18.676Z",{"id":595,"title":419,"description":596,"icon":597},857,"The M91 is SEMI S2 compliant and CE marked. Ethernet connectivity and Central Monitoring System support allow integration with your facility monitoring infrastructure.",{"id":422,"documentId":423,"name":424,"alternativeText":55,"caption":55,"width":293,"height":425,"formats":55,"hash":426,"ext":58,"mime":59,"size":427,"url":428,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":429,"updatedAt":429,"publishedAt":430},{"id":599,"subtitle":433,"title":434,"faq_accordion":600},257,[601,605,609,613,617],{"id":602,"question":603,"answer":604},1154,"What gases does the M91 treat?","\u003Cp>\u003Cspan style=\"white-space:pre-wrap;\">The M91 is designed to treat fluorinated greenhouse gases, pyrophoric and flammable gases, and other process gas byproducts generated during polysilicon production, CVD, and gas cabinet vent purge applications.\u003C\u002Fspan>\u003C\u002Fp>",{"id":606,"question":607,"answer":608},1155,"How does the M91 differ from the M91A?","\u003Cp>The M91 uses combustion and pyrolysis as its primary treatment method, making it suitable for a broad range of process gases. The M91A uses patented microwave plasma technology, which is specifically optimised for high bond-energy gases such as PFCs and NF₃ with lower fuel consumption.\u003C\u002Fp>",{"id":610,"question":611,"answer":612},1156,"How does the waterwall system work?","\u003Cp>Flowing water circulates along the inner wall of the combustion chamber during operation. This prevents byproduct deposition on the chamber wall and simultaneously cools the outer wall, extending service intervals and maintaining consistent performance.\u003C\u002Fp>",{"id":614,"question":615,"answer":616},1157,"Is the M91 suitable for high-volume production environments?","\u003Cp>Yes. The M91 supports a process gas capacity of 600 slm and is designed for ease of installation and servicing, making it suitable for integration into continuous production environments.\u003C\u002Fp>",{"id":618,"question":619,"answer":620},1158,"What connectivity does the M91 support?","\u003Cp>The M91 is Ethernet ready and supports integration with a Central Monitoring System, allowing real-time system monitoring and interlock management through your facility network.\u003C\u002Fp>",{"id":622,"title":458,"description":459,"button":623},390,{"id":624,"label":123,"link":124,"button_type":125},610,{"id":626,"documentId":627,"name":628,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":629,"ext":467,"mime":468,"size":630,"url":631,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":632,"updatedAt":632,"publishedAt":632,"related":633},451,"clv4oax179sfihmh8g1hbacx","Data Sheet-M91-KF40 X 4 Inlets-Rev.B-EN.pdf","Data_Sheet_M91_KF_40_X_4_Inlets_Rev_B_EN_db042bc598",219.96,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_M91_KF_40_X_4_Inlets_Rev_B_EN_db042bc598.pdf","2026-03-21T09:28:45.414Z",[634],{"__type":474,"id":535,"documentId":536,"title":537,"url":538,"metaTitle":539,"metaDescription":540,"subtitle":541,"description":542,"createdAt":543,"updatedAt":544,"publishedAt":545},[636,663],{"id":637,"documentId":638,"name":639,"alternativeText":55,"caption":55,"width":640,"height":641,"formats":642,"hash":656,"ext":486,"mime":487,"size":657,"url":658,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":659,"updatedAt":659,"publishedAt":660,"related":661},179,"mtr8phg0vi1x4pyu0ppfvyh6","M-91.png",468,607,{"thumbnail":643,"small":649},{"name":644,"hash":645,"ext":486,"mime":487,"path":55,"width":488,"height":489,"size":646,"sizeInBytes":647,"url":648},"thumbnail_M-91.png","thumbnail_M_91_d2a9ae5a88",21.45,21448,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_M_91_d2a9ae5a88.png",{"name":650,"hash":651,"ext":486,"mime":487,"path":55,"width":652,"height":98,"size":653,"sizeInBytes":654,"url":655},"small_M-91.png","small_M_91_d2a9ae5a88",386,138.83,138832,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_M_91_d2a9ae5a88.png","M_91_d2a9ae5a88",49.99,"https:\u002F\u002Fecosys.assetz.my\u002FM_91_d2a9ae5a88.png","2025-11-07T04:18:59.157Z","2025-11-07T04:18:59.158Z",[662],{"__type":474,"id":535,"documentId":536,"title":537,"url":538,"metaTitle":539,"metaDescription":540,"subtitle":541,"description":542,"createdAt":543,"updatedAt":544,"publishedAt":545},{"id":664,"documentId":665,"name":666,"alternativeText":55,"caption":55,"width":667,"height":668,"formats":669,"hash":677,"ext":486,"mime":487,"size":678,"url":679,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":680,"updatedAt":680,"publishedAt":681,"related":682},457,"n8ev7unfe1ml3v8j5bb1mez9","m91 6.png",426,472,{"thumbnail":670},{"name":671,"hash":672,"ext":486,"mime":487,"path":55,"width":673,"height":489,"size":674,"sizeInBytes":675,"url":676},"thumbnail_m91 6.png","thumbnail_m91_6_884dbd9bdc",141,3.46,3455,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_m91_6_884dbd9bdc.png","m91_6_884dbd9bdc",16.88,"https:\u002F\u002Fecosys.assetz.my\u002Fm91_6_884dbd9bdc.png","2026-03-21T09:40:05.294Z","2026-03-21T09:40:05.296Z",[683],{"__type":474,"id":535,"documentId":536,"title":537,"url":538,"metaTitle":539,"metaDescription":540,"subtitle":541,"description":542,"createdAt":543,"updatedAt":544,"publishedAt":545},{"id":685,"documentId":686,"title":687,"url":688,"metaTitle":689,"metaDescription":690,"subtitle":541,"description":691,"createdAt":692,"updatedAt":693,"publishedAt":694,"accordion":695,"resources":55,"specifications":55,"product_category":702,"swipe_card":715,"faq":743,"cta_banner":766,"file_upload":770,"product_image":780},109,"yswaik0gket764f127jwmvx6","Marathon M91U","marathon-m91u","Dual-Reactor Combustion and Wet Abatement System","The Marathon M91U integrates dual combustion reactors for fault-tolerant, high-throughput gas abatement. Designed for polysilicon, CVD, and pyrophoric gas applications with 600 to 1,000 slm process gas capacity. ","The Marathon M91U is a dual-reactor combustion and wet abatement system built for processes that demand continuous operation and high gas throughput. It carries forward the proven combustion architecture of the M91 and adds a second reactor that can either expand processing capacity or take over automatically if the primary reactor requires servicing. A sedimentation compartment in the sump tank separates and drains heavy particulates, reducing maintenance load and keeping the system running clean.","2025-11-13T04:58:39.369Z","2026-03-30T10:14:52.407Z","2026-03-30T10:14:52.699Z",[696,699],{"id":697,"title":378,"description":698},567,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Dual combustion reactors for expanded capacity or fault-tolerant operation\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Automatic failover reduces unplanned downtime\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Sedimentation compartment separates heavy particulates from process water\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">High flow capacity with process gas handling from 600 to 1,000 slm\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Reduced water consumption with recirculating water system\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Limited NOx and CO emissions\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low power consumption at 3,600 W\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Extensive range of optional components for site-specific configuration\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ethernet ready with Central Monitoring System support\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">SEMI S2 compliant, CE marked\u003C\u002Fli>\u003C\u002Ful>",{"id":700,"title":382,"description":701},568,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Polysilicon manufacturing\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Chemical vapour deposition (CVD)\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Pyrophoric and flammable gas combustion\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Gas cabinet vent purge\u003C\u002Fli>\u003C\u002Ful>",{"id":5,"documentId":6,"name":7,"createdAt":8,"updatedAt":9,"publishedAt":10,"url":11,"metaTitle":7,"metaDescription":12,"background_image":703,"content_block":709},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":704,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":705,"large":706,"small":707,"medium":708},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[710,711,712,713,714],{"__component":234,"id":393,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},{"__component":280,"id":395,"subtitle":282,"title":283},{"__component":326,"id":397,"subtitle":328,"title":329,"Style":330},{"__component":352,"id":399,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":401,"title":358,"description":359},{"id":716,"subtitle":404,"title":717,"cards":718},251,"Why Choose M91U",[719,733,738],{"id":720,"title":721,"description":722,"icon":723},861,"Dual Reactor Redundancy","If one reactor needs to be taken offline, the second maintains abatement without interrupting the process line, reducing exposure to unplanned downtime.",{"id":724,"documentId":725,"name":726,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":728,"ext":58,"mime":59,"size":729,"url":730,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":731,"updatedAt":731,"publishedAt":732},477,"ryo92m9xk2k7y51gnd693a1c","warning.svg",300,"warning_51f95b18bf",1.5,"https:\u002F\u002Fecosys.assetz.my\u002Fwarning_51f95b18bf.svg","2026-03-21T10:05:35.103Z","2026-03-21T10:05:35.104Z",{"id":734,"title":735,"description":736,"icon":737},862,"High-Throughput Combustion","With a process gas capacity of 600 to 1,000 slm and four KF40 inlet ports, the M91U handles the gas volumes typical of polysilicon and CVD processes.\n",{"id":587,"documentId":588,"name":589,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":590,"ext":58,"mime":59,"size":591,"url":592,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":593,"updatedAt":593,"publishedAt":593},{"id":739,"title":740,"description":741,"icon":742},863,"Globally Compliant & Smart Integration","Designed to meet SEMI S2 and CE standards, M91U offers future-ready features like Ethernet connectivity for seamless system integration and remote monitoring.",{"id":422,"documentId":423,"name":424,"alternativeText":55,"caption":55,"width":293,"height":425,"formats":55,"hash":426,"ext":58,"mime":59,"size":427,"url":428,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":429,"updatedAt":429,"publishedAt":430},{"id":744,"subtitle":433,"title":434,"faq_accordion":745},259,[746,750,754,758,762],{"id":747,"question":748,"answer":749},1164,"What is the difference between the M91U and the M91?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">\u003Cspan style=\"white-space:pre-wrap;\">The M91U adds a second combustion reactor to the proven M91 platform. This second reactor can expand total gas processing capacity or serve as a standby unit that activates automatically if the primary reactor goes offline. The M91 operates with a single reactor and does not offer this redundancy.\u003C\u002Fspan>\u003C\u002Fp>",{"id":751,"question":752,"answer":753},1165,"How does the dual-reactor design reduce downtime?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">Each reactor operates independently within the same cabinet. If one reactor encounters a fault or requires maintenance, the system continues abatement without stopping the process line.\u003C\u002Fp>",{"id":755,"question":756,"answer":757},1166,"What gases can the M91U treat?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The M91U handles pyrophoric and flammable gas combustion, CVD process gases, polysilicon production exhaust, and gas cabinet vent purge applications. For fluorinated compounds, the M91A or M91AU uses plasma-based technology better suited to that gas type.\u003C\u002Fp>",{"id":759,"question":760,"answer":761},1167,"What fuel does the M91U use, and are there alternatives?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The M91U uses methane (CH4) as its primary fuel. LPG and H2 are available as optional alternatives depending on site fuel availability and process requirements.\u003C\u002Fp>",{"id":763,"question":764,"answer":765},1168,"What utilities does the M91U require for installation?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The M91U requires 220 VAC 3-phase power, clean dry air, nitrogen, methane, fresh water, and process cooling water. Process exhaust connects via a 6-inch ANSI PVC flange. Recommended front clearance is 440 mm.\u003C\u002Fp>",{"id":767,"title":458,"description":459,"button":768},392,{"id":769,"label":123,"link":124,"button_type":125},612,{"id":771,"documentId":772,"name":773,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":774,"ext":467,"mime":468,"size":775,"url":776,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":777,"updatedAt":777,"publishedAt":777,"related":778},466,"o0mdfxt8optitr9njlq29en2","Datasheet-M91U-Rev.A-EN.pdf","Datasheet_M91_U_Rev_A_EN_ad8b3f4065",197.95,"https:\u002F\u002Fecosys.assetz.my\u002FDatasheet_M91_U_Rev_A_EN_ad8b3f4065.pdf","2026-03-21T09:48:40.206Z",[779],{"__type":474,"id":685,"documentId":686,"title":687,"url":688,"metaTitle":689,"metaDescription":690,"subtitle":541,"description":691,"createdAt":692,"updatedAt":693,"publishedAt":694},[781,822],{"id":782,"documentId":783,"name":784,"alternativeText":55,"caption":55,"width":785,"height":786,"formats":787,"hash":815,"ext":486,"mime":487,"size":816,"url":817,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":818,"updatedAt":818,"publishedAt":819,"related":820},506,"otjuy8dldk3wo63c6huyeb1t","M91U-2.png",1034,1125,{"thumbnail":788,"small":795,"medium":801,"large":808},{"name":789,"hash":790,"ext":486,"mime":487,"path":55,"width":791,"height":489,"size":792,"sizeInBytes":793,"url":794},"thumbnail_M91U-2.png","thumbnail_M91_U_2_fc65fb2809",143,24.89,24894,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_M91_U_2_fc65fb2809.png",{"name":796,"hash":797,"ext":486,"mime":487,"path":55,"width":480,"height":98,"size":798,"sizeInBytes":799,"url":800},"small_M91U-2.png","small_M91_U_2_fc65fb2809",192.28,192278,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_M91_U_2_fc65fb2809.png",{"name":802,"hash":803,"ext":486,"mime":487,"path":55,"width":804,"height":90,"size":805,"sizeInBytes":806,"url":807},"medium_M91U-2.png","medium_M91_U_2_fc65fb2809",689,411.93,411929,"https:\u002F\u002Fecosys.assetz.my\u002Fmedium_M91_U_2_fc65fb2809.png",{"name":809,"hash":810,"ext":486,"mime":487,"path":55,"width":811,"height":208,"size":812,"sizeInBytes":813,"url":814},"large_M91U-2.png","large_M91_U_2_fc65fb2809",919,680.28,680279,"https:\u002F\u002Fecosys.assetz.my\u002Flarge_M91_U_2_fc65fb2809.png","M91_U_2_fc65fb2809",287.42,"https:\u002F\u002Fecosys.assetz.my\u002FM91_U_2_fc65fb2809.png","2026-03-30T10:11:46.357Z","2026-03-30T10:11:46.358Z",[821],{"__type":474,"id":685,"documentId":686,"title":687,"url":688,"metaTitle":689,"metaDescription":690,"subtitle":541,"description":691,"createdAt":692,"updatedAt":693,"publishedAt":694},{"id":823,"documentId":824,"name":825,"alternativeText":55,"caption":55,"width":826,"height":827,"formats":828,"hash":843,"ext":486,"mime":487,"size":844,"url":845,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":846,"updatedAt":846,"publishedAt":847,"related":848},480,"hpbwmqydn3g0wq3aypnqzppq","m91u.png",576,475,{"thumbnail":829,"small":836},{"name":830,"hash":831,"ext":486,"mime":487,"path":55,"width":832,"height":489,"size":833,"sizeInBytes":834,"url":835},"thumbnail_m91u.png","thumbnail_m91u_3ff20558da",190,4.23,4229,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_m91u_3ff20558da.png",{"name":837,"hash":838,"ext":486,"mime":487,"path":55,"width":98,"height":839,"size":840,"sizeInBytes":841,"url":842},"small_m91u.png","small_m91u_3ff20558da",412,15.96,15955,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_m91u_3ff20558da.png","m91u_3ff20558da",20.08,"https:\u002F\u002Fecosys.assetz.my\u002Fm91u_3ff20558da.png","2026-03-21T10:33:12.617Z","2026-03-21T10:33:12.618Z",[849],{"__type":474,"id":685,"documentId":686,"title":687,"url":688,"metaTitle":689,"metaDescription":690,"subtitle":541,"description":691,"createdAt":692,"updatedAt":693,"publishedAt":694},{"id":851,"documentId":852,"title":853,"url":854,"metaTitle":855,"metaDescription":856,"subtitle":370,"description":857,"createdAt":858,"updatedAt":859,"publishedAt":860,"accordion":861,"resources":55,"specifications":55,"product_category":867,"swipe_card":880,"faq":907,"cta_banner":930,"file_upload":934,"product_image":945},118,"r7iha1eel4ylwq7wrv3wa38p","Marathon M91AU","marathon-m91au","Marathon M91AU Dual Reactor Plasma-Wet Abatement System","The Marathon M91AU features dual plasma reactors in one cabinet for fault-tolerant PFC abatement in semiconductor and flat panel display manufacturing. No fuel required. ","The Marathon M91AU is a dual-reactor microwave plasma and wet abatement system that delivers the same PFC treatment capability as the M91A with twice the capacity and built-in fault tolerance. Two plasma reactors operate within a single cabinet under one control panel. If one reactor goes offline, the second continues operating, maintaining abatement coverage without interrupting your production line. Designed as a point-of-use system, the M91AU treats PFC-loaded gases generated in semiconductor and flat panel display manufacturing without requiring fuel or hydrogen supply.","2025-11-13T04:57:31.804Z","2026-05-04T08:42:06.363Z","2026-05-04T08:42:12.697Z",[862,865],{"id":863,"title":378,"description":864},590,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Dual reactors with fault-tolerant design\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Does not require fuel or hydrogen\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low power consumption\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Excellent PFCs abatement efficiency\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Limited NOx and COx emissions\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">High flow capacity (600 to 1,000 slm)\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">4 inlets per reactor, 8 inlet ports total\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low cost of ownership\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ease of installation and servicing\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ethernet ready, supports Central Monitoring System\u003C\u002Fli>\u003C\u002Ful>",{"id":866,"title":382,"description":383},591,{"id":5,"documentId":6,"name":7,"createdAt":8,"updatedAt":9,"publishedAt":10,"url":11,"metaTitle":7,"metaDescription":12,"background_image":868,"content_block":874},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":869,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":870,"large":871,"small":872,"medium":873},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[875,876,877,878,879],{"__component":234,"id":393,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},{"__component":280,"id":395,"subtitle":282,"title":283},{"__component":326,"id":397,"subtitle":328,"title":329,"Style":330},{"__component":352,"id":399,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":401,"title":358,"description":359},{"id":881,"subtitle":404,"title":882,"cards":883},264,"Why Choose M91AU",[884,888,893],{"id":885,"title":721,"description":886,"icon":887},900,"Two plasma reactors in one cabinet, controlled by a single panel. If one reactor goes offline, the other takes over automatically, maintaining continuous abatement coverage and reducing the risk of unplanned production downtime.",{"id":724,"documentId":725,"name":726,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":728,"ext":58,"mime":59,"size":729,"url":730,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":731,"updatedAt":731,"publishedAt":732},{"id":889,"title":890,"description":891,"icon":892},901,"Fuel-Free Plasma Treatment","The M91AU uses plasma torches to focus high-energy electrons directly onto target gases, breaking them into smaller molecules without fuel or hydrogen. This eliminates fuel supply requirements and reduces operating costs.",{"id":290,"documentId":291,"name":292,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":294,"ext":58,"mime":59,"size":295,"url":296,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":297,"updatedAt":298,"publishedAt":297},{"id":894,"title":895,"description":896,"icon":897},902,"High Capacity PFC Abatement","With 8 inlet ports and a process gas capacity of up to 1,000 slm, the M91AU is suited for high-throughput production environments requiring treatment of large volumes of PFC-loaded gases.\n\n",{"id":898,"documentId":899,"name":900,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":901,"ext":58,"mime":59,"size":902,"url":903,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":904,"updatedAt":905,"publishedAt":906},478,"wb0bsqb1gew800ounktviqfk","speedometer.svg","speedometer_c0d4295226",1.2,"https:\u002F\u002Fecosys.assetz.my\u002Fspeedometer_c0d4295226.svg","2026-03-21T10:09:03.807Z","2026-03-30T09:09:26.059Z","2026-03-21T10:09:03.808Z",{"id":908,"subtitle":433,"title":434,"faq_accordion":909},270,[910,914,918,922,926],{"id":911,"question":912,"answer":913},1219,"What is the key difference between the M91A and M91AU?","\u003Cp>\u003Cspan style=\"white-space:pre-wrap;\">The M91A is a single-reactor plasma-wet abatement system with 4 inlet ports. The M91AU adds a second reactor within the same cabinet, doubling the inlet capacity to 8 ports and providing fault-tolerant redundancy. If one reactor requires maintenance or goes offline, the second reactor continues operating without interrupting production.\u003C\u002Fspan>\u003C\u002Fp>",{"id":915,"question":916,"answer":917},1220,"Does the M91AU require fuel or hydrogen?","\u003Cp>No. The M91AU uses plasma torches that focus high-energy electrons onto the target gases to achieve decomposition. This means no methane, LPG, or hydrogen fuel supply is required, unlike combustion-based abatement systems.\u003C\u002Fp>",{"id":919,"question":920,"answer":921},1221,"What gases does the M91AU treat?","\u003Cp>The M91AU is designed to treat PFC-loaded gases and fluorinated greenhouse gases generated during semiconductor and flat panel display manufacturing, including gases from etching, CVD, and chamber cleaning processes.\u003C\u002Fp>",{"id":923,"question":924,"answer":925},1222,"How does the fault-tolerant design work?","\u003Cp>The M91AU has two independent plasma reactors controlled by a single electrical panel. Each reactor can back up the other, configuring the system as a fully redundant unit. This means scheduled maintenance on one reactor does not require a full system shutdown.\u003C\u002Fp>",{"id":927,"question":928,"answer":929},1223," What connectivity does the M91AU support?","\u003Cp>The M91AU is Ethernet ready and supports integration with a Central Monitoring System, allowing real-time monitoring and interlock management through your facility network.\u003C\u002Fp>",{"id":931,"title":458,"description":459,"button":932},406,{"id":933,"label":123,"link":124,"button_type":125},629,{"id":935,"documentId":936,"name":937,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":938,"ext":467,"mime":468,"size":939,"url":940,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":941,"updatedAt":941,"publishedAt":942,"related":943},508,"dvlsgvlc3xdg1xsfgwvakkm5","Data Sheet-M91AU-Rev.02-EN.pdf","Data_Sheet_M91_AU_Rev_02_EN_c57d24bef5",284.08,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_M91_AU_Rev_02_EN_c57d24bef5.pdf","2026-05-04T08:40:26.486Z","2026-05-04T08:40:26.487Z",[944],{"__type":474,"id":851,"documentId":852,"title":853,"url":854,"metaTitle":855,"metaDescription":856,"subtitle":370,"description":857,"createdAt":858,"updatedAt":859,"publishedAt":860},[946,974],{"id":947,"documentId":948,"name":949,"alternativeText":55,"caption":55,"width":950,"height":951,"formats":952,"hash":967,"ext":486,"mime":487,"size":968,"url":969,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":970,"updatedAt":970,"publishedAt":971,"related":972},186,"ixe2eo9lji7orl3rwmyxg9pu","M-91AU.png",620,639,{"thumbnail":953,"small":960},{"name":954,"hash":955,"ext":486,"mime":487,"path":55,"width":956,"height":489,"size":957,"sizeInBytes":958,"url":959},"thumbnail_M-91AU.png","thumbnail_M_91_AU_2214a413c3",151,22.23,22227,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_M_91_AU_2214a413c3.png",{"name":961,"hash":962,"ext":486,"mime":487,"path":55,"width":963,"height":98,"size":964,"sizeInBytes":965,"url":966},"small_M-91AU.png","small_M_91_AU_2214a413c3",485,153.32,153325,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_M_91_AU_2214a413c3.png","M_91_AU_2214a413c3",51.48,"https:\u002F\u002Fecosys.assetz.my\u002FM_91_AU_2214a413c3.png","2025-11-07T04:19:00.050Z","2025-11-07T04:19:00.051Z",[973],{"__type":474,"id":851,"documentId":852,"title":853,"url":854,"metaTitle":855,"metaDescription":856,"subtitle":370,"description":857,"createdAt":858,"updatedAt":859,"publishedAt":860},{"id":975,"documentId":976,"name":977,"alternativeText":55,"caption":55,"width":978,"height":979,"formats":980,"hash":995,"ext":486,"mime":487,"size":996,"url":997,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":998,"updatedAt":998,"publishedAt":998,"related":999},471,"zsfhomxi2dkca4gbgmjkj57o","m91au.png",616,486,{"small":981,"thumbnail":988},{"name":982,"hash":983,"ext":486,"mime":487,"path":55,"width":98,"height":984,"size":985,"sizeInBytes":986,"url":987},"small_m91au.png","small_m91au_a2091af9a7",394,14.9,14895,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_m91au_a2091af9a7.png",{"name":989,"hash":990,"ext":486,"mime":487,"path":55,"width":991,"height":489,"size":992,"sizeInBytes":993,"url":994},"thumbnail_m91au.png","thumbnail_m91au_a2091af9a7",198,3.86,3859,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_m91au_a2091af9a7.png","m91au_a2091af9a7",18.57,"https:\u002F\u002Fecosys.assetz.my\u002Fm91au_a2091af9a7.png","2026-03-21T09:56:05.689Z",[1000],{"__type":474,"id":851,"documentId":852,"title":853,"url":854,"metaTitle":855,"metaDescription":856,"subtitle":370,"description":857,"createdAt":858,"updatedAt":859,"publishedAt":860},{"id":488,"documentId":1002,"title":1003,"url":1004,"metaTitle":1005,"metaDescription":1006,"subtitle":1007,"description":1008,"createdAt":1009,"updatedAt":1010,"publishedAt":1011,"accordion":1012,"resources":55,"specifications":55,"product_category":1018,"swipe_card":1035,"faq":1069,"cta_banner":1092,"file_upload":1096,"product_image":1107},"owsfblmnsz7wwl2465gvtagv","Guardian G91L","guardian-g91l","Guardian G91L | Combustion Abatement System | EcoSys","The Guardian G91L is a combustion abatement system with an extended combustion chamber for high H2 flow applications. 400 slm capacity, flame flashback prevention, MTBF measured in years. ","Combustion Abatement System","The Guardian G91L is a combustion abatement system designed for thermal oxidation of process gases. Effluent gases pass through a wall of active flame in the main chamber, ensuring ignition of flammable and pyrophoric process gas by-products. \n\nThe extended combustion chamber is built for high hydrogen flow applications, and with no moving parts, maintenance intervals are measured in years rather than months.","2026-03-30T09:09:39.511Z","2026-06-03T06:08:11.641Z","2026-06-03T06:08:11.950Z",[1013,1016],{"id":1014,"title":378,"description":1015},594,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Extended combustion chamber for high H2 flow applications\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Flame flashback prevention system for safe, reliable operation\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">No electrically heated elements for immediate cooldown\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">No moving parts with MTBF measured in years\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low maintenance requirement\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Natural gas fueled\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low cost of ownership\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">SEMI S2 compliant, CE marked\u003C\u002Fli>\u003C\u002Ful>",{"id":1017,"title":382,"description":701},595,{"id":32,"documentId":33,"name":34,"createdAt":35,"updatedAt":36,"publishedAt":37,"url":38,"metaTitle":34,"metaDescription":34,"background_image":1019,"content_block":1025},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":1020,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":1021,"large":1022,"small":1023,"medium":1024},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[1026,1028,1030,1032,1033],{"__component":234,"id":1027,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},351,{"__component":280,"id":1029,"subtitle":282,"title":283},286,{"__component":326,"id":1031,"subtitle":328,"title":329,"Style":330},195,{"__component":352,"id":163,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":1034,"title":358,"description":359},428,{"id":1036,"subtitle":404,"title":1037,"cards":1038},275,"Why Choose Guardian G91L",[1039,1052,1057],{"id":1040,"title":1041,"description":1042,"icon":1043},933,"Active Flame Oxidation","Effluent gases pass through a wall of flame in the main chamber, guaranteeing ignition of flammable and pyrophoric process gas by-products without reliance on electrically heated elements.\n",{"id":668,"documentId":1044,"name":1045,"alternativeText":55,"caption":55,"width":1046,"height":1046,"formats":55,"hash":1047,"ext":58,"mime":59,"size":1048,"url":1049,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1050,"updatedAt":1050,"publishedAt":1051},"l3ridl2ygm9g59xb9u5bee3j","fire_4952266.svg",512,"fire_4952266_6e33339ed5",0.83,"https:\u002F\u002Fecosys.assetz.my\u002Ffire_4952266_6e33339ed5.svg","2026-03-21T10:05:34.658Z","2026-03-21T10:05:34.659Z",{"id":1053,"title":1054,"description":1055,"icon":1056},934,"High H2 Flow Capability","The extended combustion chamber is designed for high hydrogen flow applications, handling process gas capacity up to 400 slm where standard combustion chambers would be insufficient.",{"id":898,"documentId":899,"name":900,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":901,"ext":58,"mime":59,"size":902,"url":903,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":904,"updatedAt":905,"publishedAt":906},{"id":1058,"title":1059,"description":1060,"icon":1061},935,"Low Maintenance","With no moving parts and instantaneous fuel shutoff capability, the G91L is designed for extended maintenance intervals. MTBF is measured in years, reducing the operational overhead of routine servicing.\n",{"id":1062,"documentId":1063,"name":1064,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":1065,"ext":58,"mime":59,"size":1066,"url":1067,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1068,"updatedAt":1068,"publishedAt":1068},474,"l5uvhteult312e5eesazwvy1","money-loss.svg","money_loss_41a1c0134b",2.21,"https:\u002F\u002Fecosys.assetz.my\u002Fmoney_loss_41a1c0134b.svg","2026-03-21T10:05:34.873Z",{"id":1070,"subtitle":433,"title":434,"faq_accordion":1071},272,[1072,1076,1080,1084,1088],{"id":1073,"question":1074,"answer":1075},1228,"What is the difference between the Guardian G91L and the GS8?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">\u003Cspan style=\"white-space:pre-wrap;\">The G91L includes a wet scrubbing stage and an extended combustion chamber designed for high hydrogen flow applications. The GS4 and GS8 use dry thermal oxidation only and are air-cooled, making them more compact. The G91L is suited for processes with higher H2 concentrations that require both combustion and wet treatment.\u003C\u002Fspan>\u003C\u002Fp>",{"id":1077,"question":1078,"answer":1079},1229,"What gases can the Guardian G91L treat?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The G91L handles pyrophoric and flammable gas combustion, CVD process gases, polysilicon production exhaust, and gas cabinet vent purge applications.\u003C\u002Fp>",{"id":1081,"question":1082,"answer":1083},1230,"How does the flame flashback prevention system work?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The G91L includes an instantaneous shutoff of fuel and igniters that eliminates potential ignition sources from upstream gas flows. This prevents flame from travelling back into the process line in the event of a flow reversal.\u003C\u002Fp>",{"id":1085,"question":1086,"answer":1087},1231,"What is the process gas capacity of the Guardian G91L?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The Guardian G91L has a total process gas capacity of 400 slm.\u003C\u002Fp>",{"id":1089,"question":1090,"answer":1091},1232,"What utilities does the Guardian G91L require for installation?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The G91L requires 120 VAC single-phase power, methane or hydrogen fuel, clean dry air, process cooling water, and nitrogen if the optional flashback arrestor is fitted. Process exhaust connects via an 8-inch duct. Recommended front, left, and right clearance is 914 mm.\u003C\u002Fp>",{"id":1093,"title":458,"description":459,"button":1094},417,{"id":1095,"label":123,"link":124,"button_type":125},640,{"id":1097,"documentId":1098,"name":1099,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":1100,"ext":467,"mime":468,"size":1101,"url":1102,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1103,"updatedAt":1103,"publishedAt":1104,"related":1105},463,"ymvn2pql29qsxbx0hsafj7wd","Data Sheet-G91L-KF40 & KF50 X 6 Inlets-Rev.03-EN.pdf","Data_Sheet_G91_L_KF_40_and_KF_50_X_6_Inlets_Rev_03_EN_86979bc4a0",150.83,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_G91_L_KF_40_and_KF_50_X_6_Inlets_Rev_03_EN_86979bc4a0.pdf","2026-03-21T09:48:39.877Z","2026-03-21T09:48:39.878Z",[1106],{"__type":474,"id":488,"documentId":1002,"title":1003,"url":1004,"metaTitle":1005,"metaDescription":1006,"subtitle":1007,"description":1008,"createdAt":1009,"updatedAt":1010,"publishedAt":1011},[1108,1148],{"id":1109,"documentId":1110,"name":1111,"alternativeText":55,"caption":55,"width":1112,"height":1113,"formats":1114,"hash":1142,"ext":486,"mime":487,"size":1143,"url":1144,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1145,"updatedAt":1145,"publishedAt":1145,"related":1146},503,"d0cf6h3ymh2ngtqee298gi5s","G91_Transparent.png",811,1057,{"thumbnail":1115,"medium":1121,"small":1128,"large":1135},{"name":1116,"hash":1117,"ext":486,"mime":487,"path":55,"width":488,"height":489,"size":1118,"sizeInBytes":1119,"url":1120},"thumbnail_G91_Transparent.png","thumbnail_G91_Transparent_c2a3a4cc5a",14.58,14583,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_G91_Transparent_c2a3a4cc5a.png",{"name":1122,"hash":1123,"ext":486,"mime":487,"path":55,"width":1124,"height":90,"size":1125,"sizeInBytes":1126,"url":1127},"medium_G91_Transparent.png","medium_G91_Transparent_c2a3a4cc5a",575,190.35,190345,"https:\u002F\u002Fecosys.assetz.my\u002Fmedium_G91_Transparent_c2a3a4cc5a.png",{"name":1129,"hash":1130,"ext":486,"mime":487,"path":55,"width":1131,"height":98,"size":1132,"sizeInBytes":1133,"url":1134},"small_G91_Transparent.png","small_G91_Transparent_c2a3a4cc5a",384,96.03,96029,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_G91_Transparent_c2a3a4cc5a.png",{"name":1136,"hash":1137,"ext":486,"mime":487,"path":55,"width":1138,"height":208,"size":1139,"sizeInBytes":1140,"url":1141},"large_G91_Transparent.png","large_G91_Transparent_c2a3a4cc5a",767,303.75,303749,"https:\u002F\u002Fecosys.assetz.my\u002Flarge_G91_Transparent_c2a3a4cc5a.png","G91_Transparent_c2a3a4cc5a",95.23,"https:\u002F\u002Fecosys.assetz.my\u002FG91_Transparent_c2a3a4cc5a.png","2026-03-30T09:05:16.481Z",[1147],{"__type":474,"id":488,"documentId":1002,"title":1003,"url":1004,"metaTitle":1005,"metaDescription":1006,"subtitle":1007,"description":1008,"createdAt":1009,"updatedAt":1010,"publishedAt":1011},{"id":377,"documentId":1149,"name":1150,"alternativeText":55,"caption":55,"width":975,"height":1151,"formats":1152,"hash":1167,"ext":486,"mime":487,"size":1168,"url":1169,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1170,"updatedAt":1170,"publishedAt":1171,"related":1172},"zvaczh7zu1xeil2e4ib20ykh","g91l.png",582,{"thumbnail":1153,"small":1160},{"name":1154,"hash":1155,"ext":486,"mime":487,"path":55,"width":1156,"height":489,"size":1157,"sizeInBytes":1158,"url":1159},"thumbnail_g91l.png","thumbnail_g91l_d594dff4ad",126,4.04,4038,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_g91l_d594dff4ad.png",{"name":1161,"hash":1162,"ext":486,"mime":487,"path":55,"width":1163,"height":98,"size":1164,"sizeInBytes":1165,"url":1166},"small_g91l.png","small_g91l_d594dff4ad",405,22.61,22613,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_g91l_d594dff4ad.png","g91l_d594dff4ad",7,"https:\u002F\u002Fecosys.assetz.my\u002Fg91l_d594dff4ad.png","2026-03-30T09:05:13.732Z","2026-03-30T09:05:13.733Z",[1173],{"__type":474,"id":488,"documentId":1002,"title":1003,"url":1004,"metaTitle":1005,"metaDescription":1006,"subtitle":1007,"description":1008,"createdAt":1009,"updatedAt":1010,"publishedAt":1011},{"id":1175,"documentId":1176,"title":1177,"url":1178,"metaTitle":1179,"metaDescription":1180,"subtitle":1007,"description":1181,"createdAt":1182,"updatedAt":1183,"publishedAt":1184,"accordion":1185,"resources":55,"specifications":55,"product_category":1191,"swipe_card":1204,"faq":1221,"cta_banner":1240,"file_upload":1244,"product_image":1255},122,"xuarvmny1s7t1kekt3zfhpg2","Guardian GS8","guardian-gs8","Guardian GS8 | Combustion Abatement System | EcoSys","The Guardian GS8 is a thermal oxidation system with 400 slm capacity for simultaneous multi-chamber treatment. Air-cooled, no moving parts, MTBF measured in years. ","The Guardian GS8 is a thermal oxidation system designed for reliable combustion of flammable and pyrophoric process gases. A flame wall in the main chamber, ignited by redundant fail-safe ignitors and fueled with natural gas or methane, ensures complete ignition. \n\nThe air-cooled design eliminates the need for water, and with no moving parts and multiple safety interlocks, maintenance intervals are extended with MTBF measured in years.","2026-03-30T09:16:53.095Z","2026-06-03T06:09:48.549Z","2026-06-03T06:09:48.781Z",[1186,1189],{"id":1187,"title":378,"description":1188},598,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Simultaneous treatment for multiple process chambers and furnace tubes\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Flame flashback prevention system for safe, reliable operation\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">No electrically heated elements for instantaneous shutdown\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">No moving parts with MTBF measured in years\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low maintenance requirement\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Natural gas fueled, air-cooled\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low cost of ownership\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">SEMI S2 compliant, CE marked\u003C\u002Fli>\u003C\u002Ful>",{"id":1190,"title":382,"description":701},599,{"id":32,"documentId":33,"name":34,"createdAt":35,"updatedAt":36,"publishedAt":37,"url":38,"metaTitle":34,"metaDescription":34,"background_image":1192,"content_block":1198},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":1193,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":1194,"large":1195,"small":1196,"medium":1197},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[1199,1200,1201,1202,1203],{"__component":234,"id":1027,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},{"__component":280,"id":1029,"subtitle":282,"title":283},{"__component":326,"id":1031,"subtitle":328,"title":329,"Style":330},{"__component":352,"id":163,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":1034,"title":358,"description":359},{"id":1205,"subtitle":404,"title":1206,"cards":1207},277,"Why Choose Guardian GS8",[1208,1212,1217],{"id":1209,"title":1041,"description":1210,"icon":1211},939,"A flame wall in the main chamber guarantees ignition of flammable and pyrophoric process gas by-products, with redundant fail-safe ignitors ensuring consistent operation.\n",{"id":668,"documentId":1044,"name":1045,"alternativeText":55,"caption":55,"width":1046,"height":1046,"formats":55,"hash":1047,"ext":58,"mime":59,"size":1048,"url":1049,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1050,"updatedAt":1050,"publishedAt":1051},{"id":1213,"title":1214,"description":1215,"icon":1216},940,"Multi-Chamber Treatment","The GS8 supports simultaneous treatment for multiple process chambers and furnace tubes, making it suited for higher throughput facilities.\n",{"id":317,"documentId":318,"name":319,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":320,"ext":58,"mime":59,"size":321,"url":322,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":323,"updatedAt":324,"publishedAt":323},{"id":1218,"title":1059,"description":1219,"icon":1220},941,"No moving parts, no water requirement, and instantaneous shutdown capability keep maintenance demands low and MTBF measured in years.\n",{"id":1062,"documentId":1063,"name":1064,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":1065,"ext":58,"mime":59,"size":1066,"url":1067,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1068,"updatedAt":1068,"publishedAt":1068},{"id":1222,"subtitle":433,"title":434,"faq_accordion":1223},274,[1224,1228,1232,1236],{"id":1225,"question":1226,"answer":1227},1237,"What is the difference between the Guardian GS8 and the G91L?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">\u003Cspan style=\"white-space:pre-wrap;\">The GS8 uses dry thermal oxidation and is air-cooled with no water requirement. The G91L adds a wet scrubbing stage and an extended combustion chamber specifically designed for high hydrogen flow applications. The GS8 is suited for standard flammable and pyrophoric gas treatment across multiple chambers.\u003C\u002Fspan>\u003C\u002Fp>",{"id":1229,"question":1230,"answer":1231},1238,"What gases can the Guardian GS8 treat?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The GS8 handles pyrophoric and flammable gas combustion, CVD process gases, polysilicon production exhaust, and gas cabinet vent purge applications.\u003C\u002Fp>",{"id":1233,"question":1234,"answer":1235},1239,"What is the process gas capacity of the Guardian GS8?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The Guardian GS8 has a total process gas capacity of 400 slm.\u003C\u002Fp>",{"id":1237,"question":1238,"answer":1239},1240,"What utilities does the Guardian GS8 require for installation?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The GS8 requires 120\u002F220 VAC single-phase power, methane fuel with optional LPG or hydrogen, and clean dry air. It is air-cooled and requires no process cooling water. Process exhaust connects via an 8-inch duct. Recommended front clearance is 914 mm.\u003C\u002Fp>",{"id":1241,"title":458,"description":459,"button":1242},419,{"id":1243,"label":123,"link":124,"button_type":125},642,{"id":1245,"documentId":1246,"name":1247,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":1248,"ext":467,"mime":468,"size":1249,"url":1250,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1251,"updatedAt":1251,"publishedAt":1252,"related":1253},510,"q1wwi9obbbsdm27g8a6d205u","Data Sheet-Guardian GS8-Rev.04-EN.pdf","Data_Sheet_Guardian_GS_8_Rev_04_EN_3404d90188",233.51,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_Guardian_GS_8_Rev_04_EN_3404d90188.pdf","2026-05-04T10:08:32.179Z","2026-05-04T10:08:32.180Z",[1254],{"__type":474,"id":1175,"documentId":1176,"title":1177,"url":1178,"metaTitle":1179,"metaDescription":1180,"subtitle":1007,"description":1181,"createdAt":1182,"updatedAt":1183,"publishedAt":1184},[1256,1286],{"id":1257,"documentId":1258,"name":1259,"alternativeText":55,"caption":55,"width":67,"height":67,"formats":1260,"hash":1279,"ext":486,"mime":487,"size":1280,"url":1281,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1282,"updatedAt":1282,"publishedAt":1283,"related":1284},504,"pxhu9ukdolmzdc13o8b6lu1h","GS8_Transparent.png",{"thumbnail":1261,"medium":1267,"small":1273},{"name":1262,"hash":1263,"ext":486,"mime":487,"path":55,"width":489,"height":489,"size":1264,"sizeInBytes":1265,"url":1266},"thumbnail_GS8_Transparent.png","thumbnail_GS_8_Transparent_20e1940cba",17.44,17444,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_GS_8_Transparent_20e1940cba.png",{"name":1268,"hash":1269,"ext":486,"mime":487,"path":55,"width":90,"height":90,"size":1270,"sizeInBytes":1271,"url":1272},"medium_GS8_Transparent.png","medium_GS_8_Transparent_20e1940cba",271.15,271150,"https:\u002F\u002Fecosys.assetz.my\u002Fmedium_GS_8_Transparent_20e1940cba.png",{"name":1274,"hash":1275,"ext":486,"mime":487,"path":55,"width":98,"height":98,"size":1276,"sizeInBytes":1277,"url":1278},"small_GS8_Transparent.png","small_GS_8_Transparent_20e1940cba",130.34,130335,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_GS_8_Transparent_20e1940cba.png","GS_8_Transparent_20e1940cba",122.94,"https:\u002F\u002Fecosys.assetz.my\u002FGS_8_Transparent_20e1940cba.png","2026-03-30T09:05:16.943Z","2026-03-30T09:05:16.944Z",[1285],{"__type":474,"id":1175,"documentId":1176,"title":1177,"url":1178,"metaTitle":1179,"metaDescription":1180,"subtitle":1007,"description":1181,"createdAt":1182,"updatedAt":1183,"publishedAt":1184},{"id":381,"documentId":1287,"name":1288,"alternativeText":55,"caption":55,"width":1289,"height":823,"formats":1290,"hash":1298,"ext":486,"mime":487,"size":1299,"url":1300,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1301,"updatedAt":1301,"publishedAt":1302,"related":1303},"mjj7zmbnstbvnsaddinhg7nf","gs8.png",483,{"thumbnail":1291},{"name":1292,"hash":1293,"ext":486,"mime":487,"path":55,"width":1294,"height":489,"size":1295,"sizeInBytes":1296,"url":1297},"thumbnail_gs8.png","thumbnail_gs8_af50ccf2c5",157,8.73,8727,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_gs8_af50ccf2c5.png","gs8_af50ccf2c5",15.65,"https:\u002F\u002Fecosys.assetz.my\u002Fgs8_af50ccf2c5.png","2026-03-30T09:05:15.553Z","2026-03-30T09:05:15.554Z",[1304],{"__type":474,"id":1175,"documentId":1176,"title":1177,"url":1178,"metaTitle":1179,"metaDescription":1180,"subtitle":1007,"description":1181,"createdAt":1182,"updatedAt":1183,"publishedAt":1184},{"id":1306,"documentId":1307,"title":1308,"url":1309,"metaTitle":1310,"metaDescription":1311,"subtitle":1312,"description":1313,"createdAt":1314,"updatedAt":1315,"publishedAt":1316,"accordion":1317,"resources":55,"specifications":55,"product_category":1324,"swipe_card":1341,"faq":1365,"cta_banner":1387,"file_upload":1390,"product_image":1399},123,"qdy4qm3ga1mjiz7kdg5jul7v","CDO C91","cdo-c91","CDO C91 | Integrated Thermal-Wet Abatement System | EcoSys","The CDO C91 is a thermal-wet abatement system with fault-tolerant heater design and 600 slm process gas capacity. Suited for polysilicon, CVD, and pyrophoric gas applications. ","Integrated Thermal and Wet Abatement","The CDO C91 is an integrated thermal-wet abatement system designed for demanding semiconductor, LED, and flat panel display process chemistry. It uses multiple heating rods evenly spaced in the reaction chamber to ensure thorough decomposition of process gases. \n\nA fault-tolerant heater design reduces system downtime, while a sedimentation compartment and particle separation system keep the system running clean between maintenance cycles.","2026-03-30T08:05:28.062Z","2026-06-03T06:12:12.620Z","2026-06-03T06:12:12.860Z",[1318,1321],{"id":1319,"title":378,"description":1320},600,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Fault-tolerant heater design reduces system downtime\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Multiple heating rods evenly spaced for thorough gas decomposition\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Sedimentation compartment with particle separation system\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low water consumption with recirculating water system\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Limited NOx and CO emissions\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ease of use and maintenance\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Optional accessories available\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">SEMI S2 certified\u003C\u002Fli>\u003C\u002Ful>",{"id":1322,"title":382,"description":1323},601,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Polysilicon manufacturing\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Chemical vapour deposition (CVD)\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Cryogenic, pyrophoric, and flammable gas combustion\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Gas cabinet vent purge\u003C\u002Fli>\u003C\u002Ful>",{"id":14,"documentId":15,"name":16,"createdAt":17,"updatedAt":18,"publishedAt":19,"url":20,"metaTitle":21,"metaDescription":22,"background_image":1325,"content_block":1331},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":1326,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":1327,"large":1328,"small":1329,"medium":1330},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[1332,1334,1336,1338,1339],{"__component":234,"id":1333,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},348,{"__component":280,"id":1335,"subtitle":282,"title":283},279,{"__component":326,"id":1337,"subtitle":328,"title":329,"Style":330},192,{"__component":352,"id":148,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":1340,"title":358,"description":359},421,{"id":1342,"subtitle":404,"title":1343,"cards":1344},280,"Why Choose CDO C91",[1345,1350,1361],{"id":1346,"title":1347,"description":1348,"icon":1349},948,"Fault-Tolerant Heater Design","Multiple heating rods are evenly spaced across the reaction chamber. If one heater faults, the system continues operating without shutting down the process line.\n",{"id":724,"documentId":725,"name":726,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":728,"ext":58,"mime":59,"size":729,"url":730,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":731,"updatedAt":731,"publishedAt":732},{"id":1351,"title":1352,"description":1353,"icon":1354},949,"Thermal Treatment","Uses thermal energy to decompose process gases at high operating temperatures, suited for cryogenic, pyrophoric, and flammable gas applications.\n",{"id":264,"documentId":1355,"name":1356,"alternativeText":55,"caption":55,"width":293,"height":293,"formats":55,"hash":1357,"ext":58,"mime":59,"size":1358,"url":1359,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1360,"updatedAt":1360,"publishedAt":1360},"er4kzag6o2s2sxw6xzx7kr1l","temperature.svg","temperature_721a506e6d",1.36,"https:\u002F\u002Fecosys.assetz.my\u002Ftemperature_721a506e6d.svg","2025-11-07T06:08:20.842Z",{"id":1362,"title":1059,"description":1363,"icon":1364},950,"A sedimentation compartment separates and drains heavy particulates from the system, combined with a recirculating water system to minimise operational overhead.",{"id":1062,"documentId":1063,"name":1064,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":1065,"ext":58,"mime":59,"size":1066,"url":1067,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1068,"updatedAt":1068,"publishedAt":1068},{"id":1036,"subtitle":433,"title":434,"faq_accordion":1366},[1367,1371,1375,1379,1383],{"id":1368,"question":1369,"answer":1370},1241,"What is the difference between the CDO C91 and the Marathon Series?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">\u003Cspan style=\"white-space:pre-wrap;\">The Marathon Series uses combustion or microwave plasma as its primary treatment method. The CDO C91 uses thermal abatement technology, where multiple heating rods decompose process gases inside a reaction chamber. This makes the C91 suited for applications requiring controlled high-temperature treatment without combustion fuel.\u003C\u002Fspan>\u003C\u002Fp>",{"id":1372,"question":1373,"answer":1374},1242,"What gases can the CDO C91 treat?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The C91 handles polysilicon, CVD process gases, cryogenic, pyrophoric, and flammable gas combustion, and gas cabinet vent purge applications.\u003C\u002Fp>",{"id":1376,"question":1377,"answer":1378},1243,"How does the fault-tolerant heater design work?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The C91 uses multiple heating rods evenly spaced in the reaction chamber. If one rod fails, the remaining rods continue to operate, allowing the system to maintain abatement without a full shutdown while the fault is addressed.\u003C\u002Fp>",{"id":1380,"question":1381,"answer":1382},1244,"What is the process gas capacity of the CDO C91?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The CDO C91 has a process gas capacity of 600 slm per module.\u003C\u002Fp>",{"id":1384,"question":1385,"answer":1386},1245,"What utilities does the CDO C91 require for installation?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The C91 requires 380\u002F400 VAC 3-phase power, clean dry air, nitrogen, fresh water, and process cooling water. Process exhaust connects via an 8-inch ANSI PVC flange. Recommended front clearance is 900 mm.\u003C\u002Fp>",{"id":257,"title":458,"description":459,"button":1388},{"id":1389,"label":123,"link":124,"button_type":125},645,{"id":480,"documentId":1391,"name":1392,"alternativeText":55,"caption":55,"width":55,"height":55,"formats":55,"hash":1393,"ext":467,"mime":468,"size":1394,"url":1395,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1396,"updatedAt":1396,"publishedAt":1396,"related":1397},"cmy3apg5e828lfl9nq7cce0u","Data Sheet-C91-Rev.B-EN.pdf","Data_Sheet_C91_Rev_B_EN_e2fee620b8",183.04,"https:\u002F\u002Fecosys.assetz.my\u002FData_Sheet_C91_Rev_B_EN_e2fee620b8.pdf","2026-03-21T09:48:39.562Z",[1398],{"__type":474,"id":1306,"documentId":1307,"title":1308,"url":1309,"metaTitle":1310,"metaDescription":1311,"subtitle":1312,"description":1313,"createdAt":1314,"updatedAt":1315,"publishedAt":1316},[1400,1441],{"id":524,"documentId":1401,"name":1402,"alternativeText":55,"caption":55,"width":1403,"height":1404,"formats":1405,"hash":1434,"ext":486,"mime":487,"size":1435,"url":1436,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1437,"updatedAt":1437,"publishedAt":1438,"related":1439},"cwsni8w2t1av2tw3yw9nqpek","CDO_C91-1.png",1712,2016,{"thumbnail":1406,"small":1413,"large":1420,"medium":1427},{"name":1407,"hash":1408,"ext":486,"mime":487,"path":55,"width":1409,"height":489,"size":1410,"sizeInBytes":1411,"url":1412},"thumbnail_CDO_C91-1.png","thumbnail_CDO_C91_1_15c55e9b48",132,39.27,39270,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_CDO_C91_1_15c55e9b48.png",{"name":1414,"hash":1415,"ext":486,"mime":487,"path":55,"width":1416,"height":98,"size":1417,"sizeInBytes":1418,"url":1419},"small_CDO_C91-1.png","small_CDO_C91_1_15c55e9b48",425,205.47,205467,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_CDO_C91_1_15c55e9b48.png",{"name":1421,"hash":1422,"ext":486,"mime":487,"path":55,"width":1423,"height":208,"size":1424,"sizeInBytes":1425,"url":1426},"large_CDO_C91-1.png","large_CDO_C91_1_15c55e9b48",849,658.65,658647,"https:\u002F\u002Fecosys.assetz.my\u002Flarge_CDO_C91_1_15c55e9b48.png",{"name":1428,"hash":1429,"ext":486,"mime":487,"path":55,"width":1430,"height":90,"size":1431,"sizeInBytes":1432,"url":1433},"medium_CDO_C91-1.png","medium_CDO_C91_1_15c55e9b48",637,409.22,409221,"https:\u002F\u002Fecosys.assetz.my\u002Fmedium_CDO_C91_1_15c55e9b48.png","CDO_C91_1_15c55e9b48",600.97,"https:\u002F\u002Fecosys.assetz.my\u002FCDO_C91_1_15c55e9b48.png","2026-03-30T08:00:54.464Z","2026-03-30T08:00:54.465Z",[1440],{"__type":474,"id":1306,"documentId":1307,"title":1308,"url":1309,"metaTitle":1310,"metaDescription":1311,"subtitle":1312,"description":1313,"createdAt":1314,"updatedAt":1315,"publishedAt":1316},{"id":1442,"documentId":1443,"name":1444,"alternativeText":55,"caption":55,"width":1319,"height":1445,"formats":1446,"hash":1460,"ext":486,"mime":487,"size":1461,"url":1462,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1463,"updatedAt":1463,"publishedAt":1464,"related":1465},495,"rvox4u7f8xdec17zjl98ozl3","CDO.png",663,{"thumbnail":1447,"small":1453},{"name":1448,"hash":1449,"ext":486,"mime":487,"path":55,"width":673,"height":489,"size":1450,"sizeInBytes":1451,"url":1452},"thumbnail_CDO.png","thumbnail_CDO_6839357ca9",10.57,10569,"https:\u002F\u002Fecosys.assetz.my\u002Fthumbnail_CDO_6839357ca9.png",{"name":1454,"hash":1455,"ext":486,"mime":487,"path":55,"width":1456,"height":98,"size":1457,"sizeInBytes":1458,"url":1459},"small_CDO.png","small_CDO_6839357ca9",452,79.64,79642,"https:\u002F\u002Fecosys.assetz.my\u002Fsmall_CDO_6839357ca9.png","CDO_6839357ca9",31.17,"https:\u002F\u002Fecosys.assetz.my\u002FCDO_6839357ca9.png","2026-03-30T08:01:30.634Z","2026-03-30T08:01:30.635Z",[1466],{"__type":474,"id":1306,"documentId":1307,"title":1308,"url":1309,"metaTitle":1310,"metaDescription":1311,"subtitle":1312,"description":1313,"createdAt":1314,"updatedAt":1315,"publishedAt":1316},{"id":1156,"documentId":1468,"title":1469,"url":1470,"metaTitle":1471,"metaDescription":1472,"subtitle":1473,"description":1474,"createdAt":1475,"updatedAt":1476,"publishedAt":1477,"accordion":1478,"resources":55,"specifications":55,"product_category":1484,"swipe_card":1497,"faq":1531,"cta_banner":1554,"file_upload":1558,"product_image":1568},"ljesddon7vnn76yli8537q1y","Vector V91","vector-v91","Vector V91 | Wet Abatement System | EcoSys","The Vector V91 is a wet abatement system with cyclone-driven particulate design and 600 slm capacity. Suited for epitaxy, water-soluble gases, and toxic gas treatment with optional chemical dosing.","Wet Abatement System","The Vector V91 is a wet abatement system designed for efficient treatment of acidic, water-soluble, and high-particulate process gases. It uses a cyclone-driven particulate design across both gas and water sections, making it suited to processes that generate heavy particulate loading. A chemical dosing option extends its capability to handle toxic gases including Arsine (AsH3) and Phosphine (PH3). ","2026-03-30T08:42:04.299Z","2026-06-03T06:14:04.127Z","2026-06-03T06:14:04.378Z",[1479,1481],{"id":978,"title":378,"description":1480},"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Multi-stage scrubbing\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">High flow capacity at 600 slm\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Reduced water consumption with recirculating water system\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Inlet pressure control and self-cleaning mechanisms\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Chemical dosing option for toxic gas handling\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Low cost of ownership\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ease of installation and services\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Ethernet ready with Central Monitoring System support\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">SEMI S2 compliant, CE marked\u003C\u002Fli>\u003C\u002Ful>",{"id":1482,"title":382,"description":1483},617,"\u003Cul>\u003Cli class=\"whitespace-normal break-words pl-2\">Epitaxy\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Water-soluble gas treatment\u003C\u002Fli>\u003Cli class=\"whitespace-normal break-words pl-2\">Arsine (AsH3) and Phosphine (PH3) treatment\u003C\u002Fli>\u003C\u002Ful>",{"id":24,"documentId":25,"name":26,"createdAt":27,"updatedAt":28,"publishedAt":29,"url":30,"metaTitle":26,"metaDescription":26,"background_image":1485,"content_block":1491},{"id":192,"documentId":193,"name":194,"alternativeText":55,"caption":55,"width":195,"height":196,"formats":1486,"hash":227,"ext":80,"mime":81,"size":228,"url":229,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":230,"updatedAt":230,"publishedAt":231},{"thumbnail":1487,"large":1488,"small":1489,"medium":1490},{"name":199,"hash":200,"ext":80,"mime":81,"path":55,"width":82,"height":201,"size":202,"sizeInBytes":203,"url":204},{"name":206,"hash":207,"ext":80,"mime":81,"path":55,"width":208,"height":209,"size":210,"sizeInBytes":211,"url":212},{"name":214,"hash":215,"ext":80,"mime":81,"path":55,"width":98,"height":216,"size":217,"sizeInBytes":218,"url":219},{"name":221,"hash":222,"ext":80,"mime":81,"path":55,"width":90,"height":223,"size":224,"sizeInBytes":225,"url":226},[1492,1493,1494,1495,1496],{"__component":234,"id":235,"subtitle":236,"title":237,"description":238,"featured_image_position":239,"style":240},{"__component":280,"id":281,"subtitle":282,"title":283},{"__component":326,"id":327,"subtitle":328,"title":329,"Style":330},{"__component":352,"id":160,"subtitle":55,"title":353,"listing_type":354},{"__component":356,"id":357,"title":358,"description":359},{"id":1498,"subtitle":404,"title":1499,"cards":1500},285,"Why Choose Vector V91",[1501,1513,1526],{"id":1502,"title":1503,"description":1504,"icon":1505},963,"Cyclone-Driven Design","Cyclone-driven particulate handling across both gas and water sections makes the V91 suited for high-particulate forming processes where conventional scrubbers require frequent intervention.\n",{"id":1506,"documentId":1507,"name":1508,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":1509,"ext":58,"mime":59,"size":1510,"url":1511,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1512,"updatedAt":1512,"publishedAt":1512},496,"morg2u3pkkznwby87q15k977","cyclone.svg","cyclone_ca1366af55",4.42,"https:\u002F\u002Fecosys.assetz.my\u002Fcyclone_ca1366af55.svg","2026-03-30T08:41:11.482Z",{"id":1514,"title":1515,"description":1516,"icon":1517},964,"Toxic Gas Capable","An optional chemical dosing system extends the V91 to handle toxic gases including Arsine and Phosphine, meeting stringent safety and environmental requirements.\n",{"id":1518,"documentId":1519,"name":1520,"alternativeText":55,"caption":55,"width":727,"height":727,"formats":55,"hash":1521,"ext":58,"mime":59,"size":1522,"url":1523,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":1524,"updatedAt":1525,"publishedAt":1524},449,"sag10wbwy8b35f5aesve4h2q","toxic.svg","toxic_2e5ed7a119",3.01,"https:\u002F\u002Fecosys.assetz.my\u002Ftoxic_2e5ed7a119.svg","2026-03-20T10:18:19.972Z","2026-03-30T08:41:34.999Z",{"id":1527,"title":1528,"description":1529,"icon":1530},965,"Self-Cleaning Mechanism","Inlet pressure control and self-cleaning mechanisms reduce manual maintenance requirements, keeping the system running consistently across varying process conditions.\n",{"id":432,"documentId":575,"name":576,"alternativeText":55,"caption":55,"width":293,"height":577,"formats":55,"hash":578,"ext":58,"mime":59,"size":309,"url":579,"previewUrl":55,"provider":62,"provider_metadata":55,"createdAt":580,"updatedAt":581,"publishedAt":580},{"id":1532,"subtitle":433,"title":434,"faq_accordion":1533},278,[1534,1538,1542,1546,1550],{"id":1535,"question":1536,"answer":1537},1258,"What is the difference between the Vector V91 and the Marathon Series?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">\u003Cspan style=\"white-space:pre-wrap;\">The Marathon Series uses combustion or plasma technology to treat process gases through thermal decomposition. The Vector V91 uses wet scrubbing, making it suited for acidic, water-soluble, and high-particulate gases where combustion-based treatment is not required.\u003C\u002Fspan>\u003C\u002Fp>",{"id":1539,"question":1540,"answer":1541},1259,"What gases can the Vector V91 treat?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The V91 treats water-soluble gases, epitaxy process gases, and with the chemical dosing option, toxic gases including Arsine (AsH3) and Phosphine (PH3).\u003C\u002Fp>",{"id":1543,"question":1544,"answer":1545},1260,"How does the cyclone-driven design benefit high-particulate processes?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The cyclone-driven design handles particulate separation across both the gas and water sections of the system. This reduces clogging and lowers the frequency of manual cleaning compared to conventional wet scrubbers.\u003C\u002Fp>",{"id":1547,"question":1548,"answer":1549},1261,"What is the process gas capacity of the Vector V91?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The Vector V91 has a process gas capacity of 600 slm.\u003C\u002Fp>",{"id":1551,"question":1552,"answer":1553},1262,"What utilities does the Vector V91 require for installation?","\u003Cp class=\"font-claude-response-body break-words whitespace-pre-wrap leading-[1.7]\">The V91 requires 380\u002F400 VAC 3-phase power, nitrogen, and fresh water connections. Process exhaust connects via an 8-inch ANSI PVC flange. 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