Integrated Thermal and Wet Abatement
CDO C91
The CDO C91 is an integrated thermal-wet abatement system designed for demanding semiconductor, LED, and flat panel display process chemistry. It uses multiple heating rods evenly spaced in the reaction chamber to ensure thorough decomposition of process gases. A fault-tolerant heater design reduces system downtime, while a sedimentation compartment and particle separation system keep the system running clean between maintenance cycles.
- Fault-tolerant heater design reduces system downtime
- Multiple heating rods evenly spaced for thorough gas decomposition
- Sedimentation compartment with particle separation system
- Low water consumption with recirculating water system
- Limited NOx and CO emissions
- Ease of use and maintenance
- Optional accessories available
- SEMI S2 certified
Key Features
Why Choose CDO C91
Fault-Tolerant Heater Design
Multiple heating rods are evenly spaced across the reaction chamber. If one heater faults, the system continues operating without shutting down the process line.
Thermal Treatment
Uses thermal energy to decompose process gases at high operating temperatures, suited for cryogenic, pyrophoric, and flammable gas applications.
Low Maintenance
A sedimentation compartment separates and drains heavy particulates from the system, combined with a recirculating water system to minimise operational overhead.
Frequently Asked Questions
Your questions, answered
The Marathon Series uses combustion or microwave plasma as its primary treatment method. The CDO C91 uses thermal abatement technology, where multiple heating rods decompose process gases inside a reaction chamber. This makes the C91 suited for applications requiring controlled high-temperature treatment without combustion fuel.
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