Wet Abatement System
Vector V91
The Vector V91 is a wet abatement system designed for efficient treatment of acidic, water-soluble, and high-particulate process gases. It uses a cyclone-driven particulate design across both gas and water sections, making it suited to processes that generate heavy particulate loading. A chemical dosing option extends its capability to handle toxic gases including Arsine (AsH3) and Phosphine (PH3).
- Multi-stage scrubbing
- High flow capacity at 600 slm
- Reduced water consumption with recirculating water system
- Inlet pressure control and self-cleaning mechanisms
- Chemical dosing option for toxic gas handling
- Low cost of ownership
- Ease of installation and services
- Ethernet ready with Central Monitoring System support
- SEMI S2 compliant, CE marked
Key Features
Why Choose Vector V91
Cyclone-Driven Design
Cyclone-driven particulate handling across both gas and water sections makes the V91 suited for high-particulate forming processes where conventional scrubbers require frequent intervention.
Toxic Gas Capable
An optional chemical dosing system extends the V91 to handle toxic gases including Arsine and Phosphine, meeting stringent safety and environmental requirements.
Self-Cleaning Mechanism
Inlet pressure control and self-cleaning mechanisms reduce manual maintenance requirements, keeping the system running consistently across varying process conditions.
Frequently Asked Questions
Your questions, answered
The Marathon Series uses combustion or plasma technology to treat process gases through thermal decomposition. The Vector V91 uses wet scrubbing, making it suited for acidic, water-soluble, and high-particulate gases where combustion-based treatment is not required.
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