Marathon M91

Integrated Combustion & Wet Abatement

The Marathon M91 is an integrated combustion and wet abatement system designed to remove process gases through the flame area of the main combustion chamber by means of combustion or pyrolysis. Flowing water forms a waterwall on the inner chamber wall, preventing byproduct deposition while cooling the combustion chamber. Multiple nozzles at the lower end of the chamber absorb water-soluble harmful substances before discharge. The M91 is designed for controlled decomposition and oxidation treatment of fluorinated greenhouse gases.

Advantages

Low power consumption
Limited NOx and CO emission
High flow capacity
Reduced water consumption and recirculating water system
Low cost of ownership
Ease of installation and services
SEMI S2 compliance, CE marked
Ethernet ready

Applications

Key Features

Why Choose M91

Efficient and Clean Operation

The M91 uses combustion and pyrolysis to decompose process gases, with a recirculating water system that reduces water consumption and limits NOx and COx emissions during operation.

High Capacity, Low Maintenance

With a process gas capacity of 600 slm and a waterwall design that prevents byproduct deposition, the M91 delivers consistent performance with reduced cleaning and maintenance requirements.

Globally Compliant and Connected

The M91 is SEMI S2 compliant and CE marked. Ethernet connectivity and Central Monitoring System support allow integration with your facility monitoring infrastructure.

Frequently Asked Questions

Your questions, answered

What gases does the M91 treat?

The M91 is designed to treat fluorinated greenhouse gases, pyrophoric and flammable gases, and other process gas byproducts generated during polysilicon production, CVD, and gas cabinet vent purge applications.

How does the M91 differ from the M91A?

How does the waterwall system work?

Is the M91 suitable for high-volume production environments?

What connectivity does the M91 support?