Dual-Reactor Combustion and Wet Abatement System

Integrated Combustion and Wet Abatement

Marathon M91U

The Marathon M91U is a dual-reactor combustion and wet abatement system built for processes that demand continuous operation and high gas throughput. It carries forward the proven combustion architecture of the M91 and adds a second reactor that can either expand processing capacity or take over automatically if the primary reactor requires servicing. A sedimentation compartment in the sump tank separates and drains heavy particulates, reducing maintenance load and keeping the system running clean.

Advantages

Dual combustion reactors for expanded capacity or fault-tolerant operation
Automatic failover reduces unplanned downtime
Sedimentation compartment separates heavy particulates from process water
High flow capacity with process gas handling from 600 to 1,000 slm
Reduced water consumption with recirculating water system
Limited NOx and CO emissions
Low power consumption at 3,600 W
Extensive range of optional components for site-specific configuration
Ethernet ready with Central Monitoring System support
SEMI S2 compliant, CE marked

Applications

Key Features

Why Choose M91U

Dual Reactor Redundancy

If one reactor needs to be taken offline, the second maintains abatement without interrupting the process line, reducing exposure to unplanned downtime.

High-Throughput Combustion

With a process gas capacity of 600 to 1,000 slm and four KF40 inlet ports, the M91U handles the gas volumes typical of polysilicon and CVD processes.

Globally Compliant & Smart Integration

Designed to meet SEMI S2 and CE standards, M91U offers future-ready features like Ethernet connectivity for seamless system integration and remote monitoring.

Frequently Asked Questions

Your questions, answered

What is the difference between the M91U and the M91?

The M91U adds a second combustion reactor to the proven M91 platform. This second reactor can expand total gas processing capacity or serve as a standby unit that activates automatically if the primary reactor goes offline. The M91 operates with a single reactor and does not offer this redundancy.

How does the dual-reactor design reduce downtime?

What gases can the M91U treat?

What fuel does the M91U use, and are there alternatives?

What utilities does the M91U require for installation?