Marathon M91A Plasma-Wet Abatement System

Integrated Plasma Gasification and Wet Abatement

Marathon M91A

The Marathon M91A is a microwave plasma and wet abatement system that uses very low power to break down highly stable fluorinated compounds into smaller molecules. Developed and tested as a point-of-use abatement system, the M91A is designed to treat PFC-loaded gases generated in semiconductor and flat panel display manufacturing processes. It delivers controlled decomposition and oxidation treatment of fluorinated greenhouse gases with significantly lower fuel consumption than combustion-based systems.

Advantages

Low power consumption
Excellent PFCs abatement efficiency
Limited NOx and COx emissions
High flow capacity (600 slm)
Low cost of ownership
Ease of installation and servicing
SEMI S2 compliant, CE marked
Ethernet ready, supports Central Monitoring System

Applications

Key Features

Why Choose M91A

Patented Plasma Technology

Uses patented microwave plasma to ionise and decompose highly stable fluorinated compounds at the molecular level, delivering effective PFC treatment with lower fuel consumption.

Low Power, High Performance

Microwave energy replaces fuel combustion, achieving high gas treatment performance at significantly lower power consumption and reduced operating costs.

Globally Compliant and Connected

SEMI S2 compliant and CE marked, with Ethernet connectivity and Central Monitoring System support for seamless facility integration.

Frequently Asked Questions

Your questions, answered

What makes the M91A different from the M91?

The M91 uses combustion and pyrolysis as its primary treatment method, which is suitable for a broad range of process gases. The M91A uses patented microwave plasma technology, which is specifically optimised for high bond-energy fluorinated gases such as PFCs and NF₃. The M91A requires no fuel supply and operates at significantly lower power consumption.

What gases does the M91A treat?

How does microwave plasma abatement work?

Is the M91A suitable for point-of-use installation?

What connectivity does the M91A support?