Marathon M91AU Dual Reactor Plasma-Wet Abatement System

Integrated Plasma Gasification and Wet Abatement

Marathon M91AU

The Marathon M91AU is a dual-reactor microwave plasma and wet abatement system that delivers the same PFC treatment capability as the M91A with twice the capacity and built-in fault tolerance. Two plasma reactors operate within a single cabinet under one control panel. If one reactor goes offline, the second continues operating, maintaining abatement coverage without interrupting your production line. Designed as a point-of-use system, the M91AU treats PFC-loaded gases generated in semiconductor and flat panel display manufacturing without requiring fuel or hydrogen supply.

Advantages

Dual reactors with fault-tolerant design
Does not require fuel or hydrogen
Low power consumption
Excellent PFCs abatement efficiency
Limited NOx and COx emissions
High flow capacity (600 to 1,000 slm)
3 inlets per reactor, 8 inlet ports total
Low cost of ownership
Ease of installation and servicing
SEMI S2 compliant, CE marked
Ethernet ready, supports Central Monitoring System

Applications

Key Features

Why Choose M91AU

Dual Reactor Redundancy

Two plasma reactors in one cabinet, controlled by a single panel. If one reactor goes offline, the other takes over automatically, maintaining continuous abatement coverage and reducing the risk of unplanned production downtime.

Fuel-Free Plasma Treatment

The M91AU uses plasma torches to focus high-energy electrons directly onto target gases, breaking them into smaller molecules without fuel or hydrogen. This eliminates fuel supply requirements and reduces operating costs.

High Capacity PFC Abatement

With 8 inlet ports and a process gas capacity of up to 1,000 slm, the M91AU is suited for high-throughput production environments requiring treatment of large volumes of PFC-loaded gases.

Frequently Asked Questions

Your questions, answered

What is the key difference between the M91A and M91AU?

The M91A is a single-reactor plasma-wet abatement system with 4 inlet ports. The M91AU adds a second reactor within the same cabinet, doubling the inlet capacity to 8 ports and providing fault-tolerant redundancy. If one reactor requires maintenance or goes offline, the second reactor continues operating without interrupting production.

Does the M91AU require fuel or hydrogen?

What gases does the M91AU treat?

How does the fault-tolerant design work?

What connectivity does the M91AU support?